Kohlenstoffschichten sind dünne Schichten, die überwiegend aus dem chemischen Element Kohlenstoff bestehen. Dazu zählen die Plasmapolymerschichten, die amorphen Kohlenstoffschichten (diamond-like carbon, DLC), die CVD-Diamantschichten sowie die Graphitschichten.

Die amorphen Kohlenstoffschichten werden nach VDI 2840 wie folgt eingeteilt (mit Angabe der empfohlenen Abkürzung):

  • Wasserstofffreie amorphe Kohlenstoffschichten a-C
  • Tetraedrische wasserstofffreie amorphe Kohlenstoffschichten ta-C
  • Metallhaltige wasserstofffreie amorphe Kohlenstoffschichten a-C:Me
  • Wasserstoffhaltige amorphe Kohlenstoffschichten a-C:H
  • Tetraedrische wasserstoffhaltige amorphe Kohlenstoffschichten ta-C:H
  • Metallhaltige wasserstoffhaltige amorphe Kohlenstoffschichten a-C:H:Me
  • Modifizierte wasserstoffhaltige amorphe Kohlenstoffschichten a-C:H:X

Die Abscheidung der Kohlenstoffschichten erfolgt mit den Verfahren der chemischen (CVD) oder physikalischen (PVD) Gasphasenabscheidung, meist im Vakuum. Sie werden als Dünnschichten in Schichtdicken von wenigen Mikrometern abgeschieden.

Mit Beschichtungen aus Kohlenstoff lassen sich vielfältige Oberflächenfunktionen realisieren, vor allem im Bereich der Tribologie, also in verschleißbeanspruchten Anwendungen.

Siehe auch: Plasmapolymerisation, Diamant


VDI-Richtlinie 2840 : 2005-11 Kohlenstoffschichten - Grundlagen, Schichttypen, Eigenschaften


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